Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings
Research output: Contribution to journal › Article › Research › peer-review
Standard
Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings. / Edlmayr, V.; Harzer, T. P.; Hoffmann, R. et al.
In: Journal of vacuum science & technology / A (JVST), Vol. 29, No. 4, 041506, 07.2011.
In: Journal of vacuum science & technology / A (JVST), Vol. 29, No. 4, 041506, 07.2011.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Edlmayr, V, Harzer, TP, Hoffmann, R, Kiener, D, Scheu, C & Mitterer, C 2011, 'Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings', Journal of vacuum science & technology / A (JVST), vol. 29, no. 4, 041506. https://doi.org/10.1116/1.3584803
APA
Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C., & Mitterer, C. (2011). Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings. Journal of vacuum science & technology / A (JVST), 29(4), Article 041506. https://doi.org/10.1116/1.3584803
Vancouver
Edlmayr V, Harzer TP, Hoffmann R, Kiener D, Scheu C, Mitterer C. Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings. Journal of vacuum science & technology / A (JVST). 2011 Jul;29(4):041506. doi: 10.1116/1.3584803
Author
Bibtex - Download
@article{cbdd6ed4ae0a491cb64cc0e9ae159537,
title = "Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings",
author = "V. Edlmayr and Harzer, {T. P.} and R. Hoffmann and D. Kiener and C. Scheu and C. Mitterer",
year = "2011",
month = jul,
doi = "10.1116/1.3584803",
language = "English",
volume = "29",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings
AU - Edlmayr, V.
AU - Harzer, T. P.
AU - Hoffmann, R.
AU - Kiener, D.
AU - Scheu, C.
AU - Mitterer, C.
PY - 2011/7
Y1 - 2011/7
UR - http://www.scopus.com/inward/record.url?scp=79960494482&partnerID=8YFLogxK
U2 - 10.1116/1.3584803
DO - 10.1116/1.3584803
M3 - Article
AN - SCOPUS:79960494482
VL - 29
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 4
M1 - 041506
ER -
