Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings
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in: Journal of vacuum science & technology / A (JVST), Jahrgang 29, Nr. 4, 041506, 07.2011.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings
AU - Edlmayr, V.
AU - Harzer, T. P.
AU - Hoffmann, R.
AU - Kiener, D.
AU - Scheu, C.
AU - Mitterer, C.
PY - 2011/7
Y1 - 2011/7
UR - http://www.scopus.com/inward/record.url?scp=79960494482&partnerID=8YFLogxK
U2 - 10.1116/1.3584803
DO - 10.1116/1.3584803
M3 - Article
AN - SCOPUS:79960494482
VL - 29
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 4
M1 - 041506
ER -