Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings. / Edlmayr, V.; Harzer, T. P.; Hoffmann, R. et al.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 29, Nr. 4, 041506, 07.2011.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Bibtex - Download

@article{cbdd6ed4ae0a491cb64cc0e9ae159537,
title = "Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings",
author = "V. Edlmayr and Harzer, {T. P.} and R. Hoffmann and D. Kiener and C. Scheu and C. Mitterer",
year = "2011",
month = jul,
doi = "10.1116/1.3584803",
language = "English",
volume = "29",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

AU - Edlmayr, V.

AU - Harzer, T. P.

AU - Hoffmann, R.

AU - Kiener, D.

AU - Scheu, C.

AU - Mitterer, C.

PY - 2011/7

Y1 - 2011/7

UR - http://www.scopus.com/inward/record.url?scp=79960494482&partnerID=8YFLogxK

U2 - 10.1116/1.3584803

DO - 10.1116/1.3584803

M3 - Article

AN - SCOPUS:79960494482

VL - 29

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

IS - 4

M1 - 041506

ER -