Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Infineon Technologies Germany AG, Regensburg
- Kompetenzzentrum Automobil-und Industrie-Elektronik GmbH
Details
| Original language | English |
|---|---|
| Article number | 022201 |
| Number of pages | 11 |
| Journal | Journal of vacuum science & technology / B (JVST) |
| Volume | 35.2017 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 9 Feb 2017 |
