Journal of vacuum science & technology / B (JVST), ‎0734-211X

Journal

ISSNs0734-211X, 1071-1023, 2166-2746
1 - 7 out of 7Page size: 10

Research output

  1. 2019
  2. Published

    Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target

    Lorenz, R., O`Sullivan, M., Sprenger, D., Lang, B., Köstenbauer, H., Winkler, J. & Mitterer, C., 5 Feb 2019, In: Journal of vacuum science & technology / B (JVST). 37.2019, 2, 021202.

    Research output: Contribution to journal › Article › Research › peer-review

  3. 2017
  4. Published

    Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

    Souli, I., Terziyska, V., Keckes, J., Robl, W., Zechner, J. & Mitterer, C., 9 Feb 2017, In: Journal of vacuum science & technology / B (JVST). 35.2017, 2, 11 p., 022201.

    Research output: Contribution to journal › Article › Research › peer-review

  5. 2016
  6. Published

    TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

    Mühlbacher, M., Greczynski, G., Sartory, B., Mendez Martin, F., Schalk, N., Lu, J., Hultman, L. & Mitterer, C., 19 Feb 2016, In: Journal of Vacuum Science and Technology B, JVSTB. 34.2016, 2, p. 1-8 8 p., 022202.

    Research output: Contribution to journal › Article › Research › peer-review

  7. 2013
  8. Published

    Temperature dependent growth morphologies of parahexaphenyl on SiO2 supported exfoliated graphene

    Kratzer, M., Klima, S., Teichert, C., Gajić, R., Vasić, B., Matković, A. & Ralevic, U., 2013, In: Journal of vacuum science & technology / B (JVST). 31, p. 04D114-1-04D114-7

    Research output: Contribution to journal › Article › Research › peer-review

  9. 2010
  10. Published

    Nanoscale electrical characterization of arrowhead defects in GaInP thin films grown on Ge

    Beinik, I., Galiana, B., Kratzer, M., Teichert, C., Rey-Stolle, I., Algora, C. & Tejedor, P., 2010, In: Journal of vacuum science & technology / B (JVST). 28, p. C5G5-C5G10

    Research output: Contribution to journal › Article › Research › peer-review

  11. 2006
  12. Published

    Structure of sputtered nanocomposite CrCx/a-C:H thin films

    Gassner, G., Patscheider, J., Mayrhofer, P. H., Hegedus, E., Toth, L., Kovacs, I., Pecz, B., Srot, V., Scheu, C. & Mitterer, C., 2006, In: Journal of vacuum science & technology / B (JVST). 24, p. 1837-1843

    Research output: Contribution to journal › Article › Research › peer-review

  13. 2003
  14. Published

    Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography

    Braun, D., Gajic, R., Kuchar, F., Korntner, R., Haugeneder, E., Löschner, H., Butschke, J., Letzkus, F. & Springer, R., 2003, In: Journal of vacuum science & technology / B (JVST). 21, p. 123-126

    Research output: Contribution to journal › Article › Research › peer-review

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