Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating

Research output: Contribution to journal › Article › Research › peer-review

Standard

Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating. / Wurster, Stefan; Bigl, Stephan; Cordill, Megan et al.
In: Microelectronic engineering, Vol. 167.2017, No. 5 January, 05.01.2017, p. 110-118.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Wurster, S, Bigl, S, Cordill, M & Kiener, D 2017, 'Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating', Microelectronic engineering, vol. 167.2017, no. 5 January, pp. 110-118. https://doi.org/10.1016/j.mee.2016.08.004

APA

Wurster, S., Bigl, S., Cordill, M., & Kiener, D. (2017). Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating. Microelectronic engineering, 167.2017(5 January), 110-118. https://doi.org/10.1016/j.mee.2016.08.004

Vancouver

Wurster S, Bigl S, Cordill M, Kiener D. Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating. Microelectronic engineering. 2017 Jan 5;167.2017(5 January):110-118. Epub 2016 Dec 16. doi: 10.1016/j.mee.2016.08.004

Author

Wurster, Stefan ; Bigl, Stephan ; Cordill, Megan et al. / Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating. In: Microelectronic engineering. 2017 ; Vol. 167.2017, No. 5 January. pp. 110-118.

Bibtex - Download

@article{d9dd718f0aff4c438628a553bf1eda2e,
title = "Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating",
keywords = "Atomic force microscopy, Copper metallization, Electron backscatter diffraction, Laser heating, Microstructure, Thermo-mechanical fatigue",
author = "Stefan Wurster and Stephan Bigl and Megan Cordill and Daniel Kiener",
year = "2017",
month = jan,
day = "5",
doi = "10.1016/j.mee.2016.08.004",
language = "English",
volume = "167.2017",
pages = "110--118",
journal = "Microelectronic engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "5 January",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating

AU - Wurster, Stefan

AU - Bigl, Stephan

AU - Cordill, Megan

AU - Kiener, Daniel

PY - 2017/1/5

Y1 - 2017/1/5

KW - Atomic force microscopy

KW - Copper metallization

KW - Electron backscatter diffraction

KW - Laser heating

KW - Microstructure

KW - Thermo-mechanical fatigue

UR - http://www.scopus.com/inward/record.url?scp=84994130642&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2016.08.004

DO - 10.1016/j.mee.2016.08.004

M3 - Article

AN - SCOPUS:84994130642

VL - 167.2017

SP - 110

EP - 118

JO - Microelectronic engineering

JF - Microelectronic engineering

SN - 0167-9317

IS - 5 January

ER -

View graph of relations

SFX

Publication SFX

By the same authors

View more