Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating
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in: Microelectronic engineering, Jahrgang 167.2017, Nr. 5 January, 05.01.2017, S. 110-118.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating
AU - Wurster, Stefan
AU - Bigl, Stephan
AU - Cordill, Megan
AU - Kiener, Daniel
PY - 2017/1/5
Y1 - 2017/1/5
KW - Atomic force microscopy
KW - Copper metallization
KW - Electron backscatter diffraction
KW - Laser heating
KW - Microstructure
KW - Thermo-mechanical fatigue
UR - http://www.scopus.com/inward/record.url?scp=84994130642&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2016.08.004
DO - 10.1016/j.mee.2016.08.004
M3 - Article
AN - SCOPUS:84994130642
VL - 167.2017
SP - 110
EP - 118
JO - Microelectronic engineering
JF - Microelectronic engineering
SN - 0167-9317
IS - 5 January
ER -
