Marlene Mühlbacher
(Former)
Research output
- 2015
- E-pub ahead of print
Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations
Mühlbacher, M., Bochkarev, A. S., Mendez Martin, F., Sartory, B., Chitu, L., Popov, M., Puschnig, P., Spitaler, J., Ding, H., Schalk, N., Lu, J., Hultman, L. & Mitterer, C., 26 Aug 2015, (E-pub ahead of print) In: Journal of applied physics. 118.2015, 8, 085307.Research output: Contribution to journal › Article › Research › peer-review
- Published
Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L. & Mitterer, C., 2015, In: Thin solid films. 574, p. 103-109Research output: Contribution to journal › Article › Research › peer-review
- Published
Diffusion in the Cu/TiN thin film system studied by atom probe tomography correlated with transmission electron microscopy and first-principles calculations
Mühlbacher, M., Mendez Martin, F., Lu, J., Schalk, N., Hultman, L. & Mitterer, C., 2015.Research output: Contribution to conference › Presentation › Research › peer-review
- Published
Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L. & Mitterer, C., 2015.Research output: Contribution to conference › Presentation › Research › peer-review
- Published
Functional thin films for display and microelectronics applications
Mitterer, C., Jörg, T., Franz, R., Mühlbacher, M., Sartory, B., Mendez Martin, F. & Schalk, N., 2015, In: Berg- und hüttenmännische Monatshefte : BHM. 160, 5, p. 231-234Research output: Contribution to journal › Article › Research › peer-review
- Published
Interdiffusion within model TiN/Cu and TiTaN/Cu systems synthesized by combinatorial thin film deposition
Mühlbacher, M., 2015Research output: Thesis › Doctoral Thesis
- Published
Recent progress in advanced characterization methods for the development of hard coatings: From improved composition/microstructure/property relations to insights in degradation behavior
Mitterer, C., Mühlbacher, M., Zeilinger, A., Stefenelli, M., Daniel, R., Tkadletz, M., Schalk, N., Sartory, B. & Keckes, J., 2015.Research output: Contribution to conference › Presentation › Research › peer-review
- 2014
- Published
Cu diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L. & Mitterer, C., 2014.Research output: Contribution to conference › Presentation › Research › peer-review
- Published
Diffusion studies in epitaxial TiN/Cu layers on MgO(001) by high resolution TEM and APT
Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L. & Mitterer, C., 2014.Research output: Contribution to conference › Poster › Research › peer-review
- Published
Funktionale Schichten in der µ-Elektronik
Mitterer, C., Franz, R., Jachs, C., Hofer, A. M., Jörg, T., Pachlhofer, J. & Mühlbacher, M., 2014.Research output: Contribution to conference › Poster › Research › peer-review
