Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
Research output: Contribution to conference › Presentation › Research › peer-review
Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
- Materials Center Leoben Forschungs GmbH
- Linköping University
Details
| Original language | English |
|---|---|
| Publication status | Published - 2015 |
| Event | 42nd International Conference on Metallurgical Coatings and Thin Films - San Diego, United States Duration: 20 Apr 2015 → 24 Apr 2015 https://www2.avs.org/conferences/icmctf/ |
Conference
| Conference | 42nd International Conference on Metallurgical Coatings and Thin Films |
|---|---|
| Abbreviated title | ICMCTF 2015 |
| Country/Territory | United States |
| City | San Diego |
| Period | 20/04/15 → 24/04/15 |
| Internet address |
