Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
Research output: Contribution to conference › Presentation › Research › peer-review
Standard
Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, California, United States.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, California, United States.
Research output: Contribution to conference › Presentation › Research › peer-review
Harvard
Mühlbacher, M, Mendez Martin, F, Sartory, B, Chitu, L, Lu, J, Schalk, N, Keckes, J, Hultman, L & Mitterer, C 2015, 'Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography', 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, United States, 20/04/15 - 24/04/15.
APA
Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L., & Mitterer, C. (2015). Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, California, United States.
Vancouver
Mühlbacher M, Mendez Martin F, Sartory B, Chitu L, Lu J, Schalk N et al.. Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 2015. 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, California, United States.
Author
Bibtex - Download
@conference{928c76d9abd744939265f08465f59245,
title = "Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Jun Lu and Nina Schalk and Jozef Keckes and Lars Hultman and Christian Mitterer",
year = "2015",
language = "English",
note = "42nd International Conference on Metallurgical Coatings and Thin Films , ICMCTF 2015 ; Conference date: 20-04-2015 Through 24-04-2015",
url = "https://www2.avs.org/conferences/icmctf/",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
AU - Mühlbacher, Marlene
AU - Mendez Martin, Francisca
AU - Sartory, Bernhard
AU - Chitu, Livia
AU - Lu, Jun
AU - Schalk, Nina
AU - Keckes, Jozef
AU - Hultman, Lars
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
M3 - Presentation
T2 - 42nd International Conference on Metallurgical Coatings and Thin Films
Y2 - 20 April 2015 through 24 April 2015
ER -
