Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
Standard
Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, Kalifornien, USA / Vereinigte Staaten.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, Kalifornien, USA / Vereinigte Staaten.
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
Harvard
Mühlbacher, M, Mendez Martin, F, Sartory, B, Chitu, L, Lu, J, Schalk, N, Keckes, J, Hultman, L & Mitterer, C 2015, 'Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography', 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, USA / Vereinigte Staaten, 20/04/15 - 24/04/15.
APA
Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L., & Mitterer, C. (2015). Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, Kalifornien, USA / Vereinigte Staaten.
Vancouver
Mühlbacher M, Mendez Martin F, Sartory B, Chitu L, Lu J, Schalk N et al.. Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, Kalifornien, USA / Vereinigte Staaten.
Author
Bibtex - Download
@conference{928c76d9abd744939265f08465f59245,
title = "Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Jun Lu and Nina Schalk and Jozef Keckes and Lars Hultman and Christian Mitterer",
year = "2015",
language = "English",
note = "42nd International Conference on Metallurgical Coatings and Thin Films , ICMCTF 2015 ; Conference date: 20-04-2015 Through 24-04-2015",
url = "https://www2.avs.org/conferences/icmctf/",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
AU - Mühlbacher, Marlene
AU - Mendez Martin, Francisca
AU - Sartory, Bernhard
AU - Chitu, Livia
AU - Lu, Jun
AU - Schalk, Nina
AU - Keckes, Jozef
AU - Hultman, Lars
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
M3 - Presentation
T2 - 42nd International Conference on Metallurgical Coatings and Thin Films
Y2 - 20 April 2015 through 24 April 2015
ER -
