Marlene Mühlbacher

(Former)

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Research output

  1. Published

    Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Lu, J., Schalk, N., Lars, H. & Mitterer, C., 2014.

    Research output: Contribution to conference › Presentation › Research › peer-review

  2. Published

    Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Keckes, J., Lu, J., Lars, H. & Mitterer, C., 2013.

    Research output: Contribution to conference › Presentation › Research › peer-review

  3. E-pub ahead of print

    Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations

    Mühlbacher, M., Bochkarev, A. S., Mendez Martin, F., Sartory, B., Chitu, L., Popov, M., Puschnig, P., Spitaler, J., Ding, H., Schalk, N., Lu, J., Hultman, L. & Mitterer, C., 26 Aug 2015, (E-pub ahead of print) In: Journal of applied physics. 118.2015, 8, 085307.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

    Mühlbacher, M., Greczynski, G., Sartory, B., Mendez Martin, F., Schalk, N., Lu, J., Hultman, L. & Mitterer, C., 19 Feb 2016, In: Journal of Vacuum Science and Technology B, JVSTB. 34.2016, 2, p. 1-8 8 p., 022202.

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L. & Mitterer, C., 2015.

    Research output: Contribution to conference › Presentation › Research › peer-review

  6. Published

    Diffusion in the Cu/TiN thin film system studied by atom probe tomography correlated with transmission electron microscopy and first-principles calculations

    Mühlbacher, M., Mendez Martin, F., Lu, J., Schalk, N., Hultman, L. & Mitterer, C., 2015.

    Research output: Contribution to conference › Presentation › Research › peer-review

  7. Published

    Diffusion Studies in the TiN/Cu Bilayer System and Beyond

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Greczynski, G., Lu, J., Schalk, N., Hultman, L. & Mitterer, C., 2016.

    Research output: Contribution to conference › Presentation › Research › peer-review

  8. Published

    Deformation Mechanisms in Magnetron Sputtered Thin Film Metallic Glasses

    Mühlbacher, M., Gammer, C., Konetschnik, R., Schöberl, T., Mitterer, C. & Eckert, J., Mar 2017.

    Research output: Contribution to conference › Poster › Research

  9. Published

    Interdiffusion within model TiN/Cu and TiTaN/Cu systems synthesized by combinatorial thin film deposition

    Mühlbacher, M., 2015

    Research output: Thesis › Doctoral Thesis

  10. Published

    Influence of Fe impurities on structure and properties of AlCrN films grown by cathodic arc evaporation

    Mühlbacher, M., 2011, 34 p.

    Research output: Thesis › Diploma Thesis › peer-review

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