Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT
Research output: Contribution to conference › Presentation › Research › peer-review
Authors
Organisational units
External Organisational units
- Linköping University
- Materials Center Leoben Forschungs GmbH
Details
Original language | English |
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Publication status | Published - 2014 |
Event | nanoFIS Konferenz - Graz, Austria Duration: 3 Dec 2014 → 5 Dec 2014 |
Conference
Conference | nanoFIS Konferenz |
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Country/Territory | Austria |
City | Graz |
Period | 3/12/14 → 5/12/14 |