Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

Research output: Contribution to conferencePresentationResearchpeer-review

External Organisational units

  • Linköping University
  • Materials Center Leoben Forschungs GmbH

Details

Original languageEnglish
Publication statusPublished - 2014
EventnanoFIS Konferenz - Graz, Austria
Duration: 3 Dec 20145 Dec 2014

Conference

ConferencenanoFIS Konferenz
Country/TerritoryAustria
CityGraz
Period3/12/145/12/14