TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Materials Center Leoben Forschungs GmbH
- Linköping University
Details
| Original language | English |
|---|---|
| Article number | 022202 |
| Pages (from-to) | 1-8 |
| Number of pages | 8 |
| Journal | Journal of Vacuum Science and Technology B, JVSTB |
| Volume | 34.2016 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 19 Feb 2016 |
