Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
11 - 20 out of 28Page size: 10

Research output

  1. E-pub ahead of print

    Oxidation behavior of a cathodic arc evaporated Cr0.69Ta0.20B0.11N coating

    Kainz, C., Letofsky-Papst, I., Saringer, C., Krüger, H., Stark, A., Schell, N., Pohler, M. & Czettl, C., 1 Feb 2023, (E-pub ahead of print) In: Journal of vacuum science & technology / A (JVST). 41.2023, 2, 10 p., 023102.

    Research output: Contribution to journal › Article › Research › peer-review

  2. Published

    In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study

    Knabl, F., Bandl, C., Griesser, T. & Mitterer, C., 17 Jan 2024, In: Journal of vacuum science & technology / A (JVST). 42.2024, 2, 10 p., 023201.

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Lead-free dielectric thin films: Synthesis of Ag(Nb1−xTax)O3 via reactive dc magnetron sputtering

    Kölbl, L., Mehrabi, M., Griesser, T., Munnik, F. & Mitterer, C., 6 Dec 2024, In: Journal of vacuum science & technology / A (JVST). 43.2024, 1, 11 p.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

    Lorenz, R., O'Sullivan, M., Sprenger, D., Lang, B. & Mitterer, C., 18 May 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6 p., 041504.

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses

    Meindlhumer, M., Ziegelwanger, T., Grau, J., Sternschulte, H., Sztucki, M., Steinmüller-Nethl, D. & Keckes, J., 12 Jan 2024, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 42.2024, 2, 12 p., 023401.

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Thermal stability of sputtered intermetallic Al-Au coatings

    Moser, M., Mayrhofer, P. H., Rainforth, W. M. & Ross, I. M., 2007, In: Journal of vacuum science & technology / A (JVST). p. 1402-1406

    Research output: Contribution to journal › Article › Research › peer-review

  7. Published

    Beyond b-C3-N4-Fullerene-like carbon nitride: A promising coating material

    Neidhardt, J. & Hultman, L., 2007, In: Journal of vacuum science & technology / A (JVST). A 25, p. 633-644

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings

    Pfeiler, M., Scheu, C., Hutter, H., Schnöller, J., Michotte, C., Mitterer, C. & Kathrein, M., 2009, In: Journal of vacuum science & technology / A (JVST). 27, p. 554-560

    Research output: Contribution to journal › Article › Research › peer-review

  10. Published

    Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

    Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.

    Research output: Contribution to journal › Article › Research › peer-review

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