Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

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Titel in ÜbersetzungInvestigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets
OriginalspracheEnglisch
StatusVeröffentlicht - 2010
Veranstaltung11th European Vacuum Conference - Salamanca, Spanien
Dauer: 20 Sept. 201024 Sept. 2010

Konferenz

Konferenz11th European Vacuum Conference
Land/GebietSpanien
OrtSalamanca
Zeitraum20/09/1024/09/10