Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets
Publikationen: Konferenzbeitrag › Poster › Forschung › (peer-reviewed)
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Titel in Übersetzung | Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets |
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Originalsprache | Englisch |
Status | Veröffentlicht - 2010 |
Veranstaltung | 11th European Vacuum Conference - Salamanca, Spanien Dauer: 20 Sept. 2010 → 24 Sept. 2010 |
Konferenz
Konferenz | 11th European Vacuum Conference |
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Land/Gebiet | Spanien |
Ort | Salamanca |
Zeitraum | 20/09/10 → 24/09/10 |