Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

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Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets. / Pohler, Markus; Franz, Robert; Ramm, Jürgen et al.
2010. Postersitzung präsentiert bei 11th European Vacuum Conference, Salamanca, Spanien.

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

Harvard

APA

Pohler, M., Franz, R., Ramm, J., Polzer, C., & Mitterer, C. (2010). Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets. Postersitzung präsentiert bei 11th European Vacuum Conference, Salamanca, Spanien.

Vancouver

Pohler M, Franz R, Ramm J, Polzer C, Mitterer C. Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets. 2010. Postersitzung präsentiert bei 11th European Vacuum Conference, Salamanca, Spanien.

Author

Pohler, Markus ; Franz, Robert ; Ramm, Jürgen et al. / Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets. Postersitzung präsentiert bei 11th European Vacuum Conference, Salamanca, Spanien.

Bibtex - Download

@conference{c304ae4274ea437190c305acae55d94c,
title = "Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets",
author = "Markus Pohler and Robert Franz and J{\"u}rgen Ramm and C. Polzer and Christian Mitterer",
year = "2010",
language = "English",
note = "11th European Vacuum Conference ; Conference date: 20-09-2010 Through 24-09-2010",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

AU - Pohler, Markus

AU - Franz, Robert

AU - Ramm, Jürgen

AU - Polzer, C.

AU - Mitterer, Christian

PY - 2010

Y1 - 2010

M3 - Poster

T2 - 11th European Vacuum Conference

Y2 - 20 September 2010 through 24 September 2010

ER -