Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

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Translated title of the contribution	Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets
Original language	English
Publication status	Published - 2010
Event	11th European Vacuum Conference - Salamanca, Spain Duration: 20 Sept 2010 → 24 Sept 2010

Conference	11th European Vacuum Conference
Country/Territory	Spain
City	Salamanca
Period	20/09/10 → 24/09/10