Cathodic arc deposition of (Al,Cr)2O3: Macroparticles and cathode surface modifications

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Translated title of the contributionCathodic arc deposition of (Al,Cr)2O3: Macroparticles and cathode surface modifications
Original languageEnglish
Pages (from-to)1454-1460
JournalSurface & coatings technology
Volume206
DOIs
Publication statusPublished - 2011