Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography
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| Translated title of the contribution | Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography |
|---|---|
| Original language | English |
| Pages (from-to) | 123-126 |
| Journal | Journal of vacuum science & technology / B (JVST) |
| Volume | 21 |
| Publication status | Published - 2003 |
