Structure of sputtered nanocomposite CrCx/a-C:H thin films
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| Translated title of the contribution | Structure of sputtered nanocomposite CrCx/a-C:H thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 1837-1843 |
| Journal | Journal of vacuum science & technology / B (JVST) |
| Volume | 24 |
| DOIs | |
| Publication status | Published - 2006 |
