Structure of sputtered nanocomposite CrCx/a-C:H thin films
Research output: Contribution to journal › Article › Research › peer-review
Standard
Structure of sputtered nanocomposite CrCx/a-C:H thin films. / Gassner, Gert; Patscheider, Jörg; Mayrhofer, Paul Heinz et al.
In: Journal of vacuum science & technology / B (JVST), Vol. 24, 2006, p. 1837-1843.
In: Journal of vacuum science & technology / B (JVST), Vol. 24, 2006, p. 1837-1843.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Gassner, G, Patscheider, J, Mayrhofer, PH, Hegedus, E, Toth, L, Kovacs, I, Pecz, B, Srot, V, Scheu, C & Mitterer, C 2006, 'Structure of sputtered nanocomposite CrCx/a-C:H thin films', Journal of vacuum science & technology / B (JVST), vol. 24, pp. 1837-1843. https://doi.org/10.1116/1.2216713
APA
Gassner, G., Patscheider, J., Mayrhofer, P. H., Hegedus, E., Toth, L., Kovacs, I., Pecz, B., Srot, V., Scheu, C., & Mitterer, C. (2006). Structure of sputtered nanocomposite CrCx/a-C:H thin films. Journal of vacuum science & technology / B (JVST), 24, 1837-1843. https://doi.org/10.1116/1.2216713
Vancouver
Gassner G, Patscheider J, Mayrhofer PH, Hegedus E, Toth L, Kovacs I et al. Structure of sputtered nanocomposite CrCx/a-C:H thin films. Journal of vacuum science & technology / B (JVST). 2006;24:1837-1843. doi: 10.1116/1.2216713
Author
Bibtex - Download
@article{c5fe62225c5c4526ae5705dc9c7ab6ad,
title = "Structure of sputtered nanocomposite CrCx/a-C:H thin films",
author = "Gert Gassner and J{\"o}rg Patscheider and Mayrhofer, {Paul Heinz} and E. Hegedus and L. Toth and I. Kovacs and B. Pecz and V. Srot and Christina Scheu and Christian Mitterer",
year = "2006",
doi = "10.1116/1.2216713",
language = "English",
volume = "24",
pages = "1837--1843",
journal = "Journal of vacuum science & technology / B (JVST)",
issn = "0734-211X",
publisher = "AVS Science and Technology Society",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Structure of sputtered nanocomposite CrCx/a-C:H thin films
AU - Gassner, Gert
AU - Patscheider, Jörg
AU - Mayrhofer, Paul Heinz
AU - Hegedus, E.
AU - Toth, L.
AU - Kovacs, I.
AU - Pecz, B.
AU - Srot, V.
AU - Scheu, Christina
AU - Mitterer, Christian
PY - 2006
Y1 - 2006
U2 - 10.1116/1.2216713
DO - 10.1116/1.2216713
M3 - Article
VL - 24
SP - 1837
EP - 1843
JO - Journal of vacuum science & technology / B (JVST)
JF - Journal of vacuum science & technology / B (JVST)
SN - 0734-211X
ER -
