Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
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| Translated title of the contribution | Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters |
|---|---|
| Original language | English |
| Pages (from-to) | 8655-8662 |
| Journal | Thin solid films |
| Volume | 516 |
| Publication status | Published - 2008 |
