Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
Research output: Contribution to journal › Article › Research › peer-review
Standard
Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters. / Massl, Stefan; Köstenbauer, H.; Keckes, Jozef et al.
In: Thin solid films, Vol. 516, 2008, p. 8655-8662.
In: Thin solid films, Vol. 516, 2008, p. 8655-8662.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Massl, S, Köstenbauer, H, Keckes, J & Pippan, R 2008, 'Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters', Thin solid films, vol. 516, pp. 8655-8662.
APA
Massl, S., Köstenbauer, H., Keckes, J., & Pippan, R. (2008). Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters. Thin solid films, 516, 8655-8662.
Vancouver
Massl S, Köstenbauer H, Keckes J, Pippan R. Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters. Thin solid films. 2008;516:8655-8662.
Author
Bibtex - Download
@article{c8457481fc1644579982897942726d98,
title = "Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters",
author = "Stefan Massl and H. K{\"o}stenbauer and Jozef Keckes and Reinhard Pippan",
year = "2008",
language = "English",
volume = "516",
pages = "8655--8662",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
AU - Massl, Stefan
AU - Köstenbauer, H.
AU - Keckes, Jozef
AU - Pippan, Reinhard
PY - 2008
Y1 - 2008
M3 - Article
VL - 516
SP - 8655
EP - 8662
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
