Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation
Research output: Contribution to journal › Article › Research › peer-review
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Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation. / Rausch, Martin; Pavlovic, Márius; Kreiml, Patrice et al.
In: Applied surface science, Vol. 455, 2018, p. 1029-1036.
In: Applied surface science, Vol. 455, 2018, p. 1029-1036.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Rausch, M, Pavlovic, M, Kreiml, P, Cordill, M, Winkler, J & Mitterer, C 2018, 'Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation', Applied surface science, vol. 455, pp. 1029-1036. https://doi.org/10.1016/j.apsusc.2018.06.012
APA
Vancouver
Rausch M, Pavlovic M, Kreiml P, Cordill M, Winkler J, Mitterer C. Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation. Applied surface science. 2018;455:1029-1036. doi: 10.1016/j.apsusc.2018.06.012
Author
Bibtex - Download
@article{d30727145773436bb4e240ba7781ad66,
title = "Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation",
author = "Martin Rausch and M{\'a}rius Pavlovic and Patrice Kreiml and Megan Cordill and J{\"o}rg Winkler and Christian Mitterer",
year = "2018",
doi = "10.1016/j.apsusc.2018.06.012",
language = "English",
volume = "455",
pages = "1029--1036",
journal = "Applied surface science",
issn = "0169-4332",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation
AU - Rausch, Martin
AU - Pavlovic, Márius
AU - Kreiml, Patrice
AU - Cordill, Megan
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1016/j.apsusc.2018.06.012
DO - 10.1016/j.apsusc.2018.06.012
M3 - Article
VL - 455
SP - 1029
EP - 1036
JO - Applied surface science
JF - Applied surface science
SN - 0169-4332
ER -
