Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Faculty of Electrical Engineering and Information Technology, Slovak University of Technology in Bratislava
- PLANSEE SE
- Erich Schmid Institute of Materials Science
Details
| Original language | English |
|---|---|
| Pages (from-to) | 1029-1036 |
| Journal | Applied surface science |
| Volume | 455 |
| DOIs | |
| Publication status | Published - 2018 |
