Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: Applied surface science, Jahrgang 455, 2018, S. 1029-1036.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation
AU - Rausch, Martin
AU - Pavlovic, Márius
AU - Kreiml, Patrice
AU - Cordill, Megan
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1016/j.apsusc.2018.06.012
DO - 10.1016/j.apsusc.2018.06.012
M3 - Article
VL - 455
SP - 1029
EP - 1036
JO - Applied surface science
JF - Applied surface science
SN - 0169-4332
ER -