Photonic superlattice multilayers for EUV lithography infrastructure
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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Details
| Original language | English |
|---|---|
| Title of host publication | 34th European Mask and Lithography Conference |
| Publisher | SPIE |
| Volume | 10775 |
| ISBN (print) | 9781510621213 |
| DOIs | |
| Publication status | Published - 1 Jan 2018 |
| Event | 34th European Mask and Lithography Conference, EMLC 2018 - Grenoble, France Duration: 18 Jun 2018 → 20 Jun 2018 |
Conference
| Conference | 34th European Mask and Lithography Conference, EMLC 2018 |
|---|---|
| Country/Territory | France |
| City | Grenoble |
| Period | 18/06/18 → 20/06/18 |
