Simulation von EUV-Spiegeln
Research output: Contribution to conference › Poster › Transfer
Authors
Organisational units
Details
| Original language | German |
|---|---|
| Publication status | Published - 17 May 2018 |
| Event | Silicon Alps Spotlight: Neue Materialien und Materialtechnologien für Innovationen in der Mikroelektronik - Impulszentrum Werkstoffe, Leoben, Austria Duration: 17 May 2018 → 17 May 2018 https://www.silicon-alps.at/veranstaltungen/silicon-alps-spotlight-materialforschung-fuer-mikroelektronik-in-leoben/ |
Conference
| Conference | Silicon Alps Spotlight |
|---|---|
| Country/Territory | Austria |
| City | Leoben |
| Period | 17/05/18 → 17/05/18 |
| Internet address |
