Nanostructure formation on ion-eroded SiGe film surfaces

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Authors

Translated title of the contribution	Nanostructure formation on ion-eroded SiGe film surfaces
Original language	English
Pages (from-to)	281-291
Journal	Superlattices and microstructures
Volume	36
DOIs	https://doi.org/10.1016/j.spmi.2004.08.003
Publication status	Published - 2004