Nanostructure formation on ion-eroded SiGe film surfaces

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Nanostructure formation on ion-eroded SiGe film surfaces. / Hofer, Christian; Teichert, Christian; Kasper, Erich.
In: Superlattices and microstructures, Vol. 36, 2004, p. 281-291.

Research output: Contribution to journalArticleResearchpeer-review

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@article{51dec1aeb6df4974a1147dfc88c74861,
title = "Nanostructure formation on ion-eroded SiGe film surfaces",
author = "Christian Hofer and Christian Teichert and Erich Kasper",
year = "2004",
doi = "10.1016/j.spmi.2004.08.003",
language = "English",
volume = "36",
pages = "281--291",
journal = "Superlattices and microstructures",
issn = "0749-6036",
publisher = "Academic Press Inc.",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Nanostructure formation on ion-eroded SiGe film surfaces

AU - Hofer, Christian

AU - Teichert, Christian

AU - Kasper, Erich

PY - 2004

Y1 - 2004

U2 - 10.1016/j.spmi.2004.08.003

DO - 10.1016/j.spmi.2004.08.003

M3 - Article

VL - 36

SP - 281

EP - 291

JO - Superlattices and microstructures

JF - Superlattices and microstructures

SN - 0749-6036

ER -