Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures

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Authors

Translated title of the contribution	Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
Original language	English
Pages (from-to)	267-273
Journal	Applied surface science
Volume	256
DOIs	https://doi.org/10.1016/j.apsusc.2009.08.013
Publication status	Published - 2009