Modification and characterization of thin silicon gate oxides using conducting atomic force microscopy
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| Translated title of the contribution | Modification and characterization of thin silicon gate oxides using conducting atomic force microscopy |
|---|---|
| Original language | English |
| Pages (from-to) | 88-93 |
| Journal | Materials science and engineering B (Solid-state materials for advanced technology) |
| Volume | 102 |
| Publication status | Published - 2003 |
