Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films
Research output: Contribution to conference › Poster › Research
Authors
Organisational units
External Organisational units
- PLANSEE SE
Details
| Original language | English |
|---|---|
| Publication status | Published - 2018 |
| Event | ICMCTF - San Diego, United States Duration: 23 Apr 2018 → 27 Apr 2018 |
Conference
| Conference | ICMCTF |
|---|---|
| Country/Territory | United States |
| City | San Diego |
| Period | 23/04/18 → 27/04/18 |
