Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films

Research output: Contribution to journal › Article › Research › peer-review

Authors

Original language	English
Pages (from-to)	354-359
Journal	Surface & coatings technology
DOIs	https://doi.org/10.1016/j.surfcoat.2018.07.095
Publication status	Published - 2018