Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- PLANSEE SE
Details
| Original language | English |
|---|---|
| Pages (from-to) | 354-359 |
| Journal | Surface & coatings technology |
| DOIs | |
| Publication status | Published - 2018 |
