Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films

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Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films. / Hofer-Roblyek, Anna Maria; Pichler, Karl-Heinz; Linke, Christian et al.
2018. Poster session presented at ICMCTF, San Diego, United States.

Research output: Contribution to conferencePosterResearch

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APA

Hofer-Roblyek, A. M., Pichler, K.-H., Linke, C., Franz, R., Winkler, J., & Mitterer, C. (2018). Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films. Poster session presented at ICMCTF, San Diego, United States.

Vancouver

Author

Hofer-Roblyek, Anna Maria ; Pichler, Karl-Heinz ; Linke, Christian et al. / Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films. Poster session presented at ICMCTF, San Diego, United States.

Bibtex - Download

@conference{bbdf566ac1f348cc9b9af0d855cf9242,
title = "Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films",
author = "Hofer-Roblyek, {Anna Maria} and Karl-Heinz Pichler and Christian Linke and Robert Franz and J{\"o}rg Winkler and Christian Mitterer",
year = "2018",
language = "English",
note = "ICMCTF ; Conference date: 23-04-2018 Through 27-04-2018",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films

AU - Hofer-Roblyek, Anna Maria

AU - Pichler, Karl-Heinz

AU - Linke, Christian

AU - Franz, Robert

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

M3 - Poster

T2 - ICMCTF

Y2 - 23 April 2018 through 27 April 2018

ER -