Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres
Research output: Contribution to journal › Article › Research › peer-review
Standard
Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres. / Franz, Robert; Mendez Martin, Francisca; Hawranek, Gerhard et al.
In: Journal of vacuum science & technology / A (JVST), Vol. Vol. 34, No. No. 2, 2016, p. 1-8.
In: Journal of vacuum science & technology / A (JVST), Vol. Vol. 34, No. No. 2, 2016, p. 1-8.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Franz, R, Mendez Martin, F, Hawranek, G & Polcik, P 2016, 'Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres', Journal of vacuum science & technology / A (JVST), vol. Vol. 34, no. No. 2, pp. 1-8. https://doi.org/10.1116/1.4941409
APA
Franz, R., Mendez Martin, F., Hawranek, G., & Polcik, P. (2016). Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres. Journal of vacuum science & technology / A (JVST), Vol. 34(No. 2), 1-8. https://doi.org/10.1116/1.4941409
Vancouver
Franz R, Mendez Martin F, Hawranek G, Polcik P. Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres. Journal of vacuum science & technology / A (JVST). 2016;Vol. 34(No. 2):1-8. doi: http://dx.doi.org/10.1116/1.4941409
Author
Bibtex - Download
@article{85ae77b5682c428a908f6f35dbeedf49,
title = "Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres",
author = "Robert Franz and {Mendez Martin}, Francisca and Gerhard Hawranek and Peter Polcik",
year = "2016",
doi = "http://dx.doi.org/10.1116/1.4941409",
language = "English",
volume = "Vol. 34",
pages = "1--8",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "No. 2",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres
AU - Franz, Robert
AU - Mendez Martin, Francisca
AU - Hawranek, Gerhard
AU - Polcik, Peter
PY - 2016
Y1 - 2016
U2 - http://dx.doi.org/10.1116/1.4941409
DO - http://dx.doi.org/10.1116/1.4941409
M3 - Article
VL - Vol. 34
SP - 1
EP - 8
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - No. 2
ER -
