Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres. / Franz, Robert; Mendez Martin, Francisca; Hawranek, Gerhard et al.
in: Journal of vacuum science & technology / A (JVST), Jahrgang Vol. 34, Nr. No. 2, 2016, S. 1-8.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Bibtex - Download

@article{85ae77b5682c428a908f6f35dbeedf49,
title = "Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres",
author = "Robert Franz and {Mendez Martin}, Francisca and Gerhard Hawranek and Peter Polcik",
year = "2016",
doi = "http://dx.doi.org/10.1116/1.4941409",
language = "English",
volume = "Vol. 34",
pages = "1--8",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "No. 2",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

AU - Franz, Robert

AU - Mendez Martin, Francisca

AU - Hawranek, Gerhard

AU - Polcik, Peter

PY - 2016

Y1 - 2016

U2 - http://dx.doi.org/10.1116/1.4941409

DO - http://dx.doi.org/10.1116/1.4941409

M3 - Article

VL - Vol. 34

SP - 1

EP - 8

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

IS - No. 2

ER -