Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
Research output: Contribution to journal › Article › Research › peer-review
Standard
Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN. / Saringer, Christian; Franz, Robert; Zorn, Katrin et al.
In: Journal of vacuum science & technology / A (JVST), Vol. 34.2016, No. 4, 041517, 01.07.2016.
In: Journal of vacuum science & technology / A (JVST), Vol. 34.2016, No. 4, 041517, 01.07.2016.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
APA
Vancouver
Saringer C, Franz R, Zorn K, Mitterer C. Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN. Journal of vacuum science & technology / A (JVST). 2016 Jul 1;34.2016(4):041517. doi: 10.1116/1.4954949
Author
Bibtex - Download
@article{efe8d011d39f48a0a82ba94e3c7c7da2,
title = "Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN",
author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",
year = "2016",
month = jul,
day = "1",
doi = "10.1116/1.4954949",
language = "English",
volume = "34.2016",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
AU - Saringer, Christian
AU - Franz, Robert
AU - Zorn, Katrin
AU - Mitterer, Christian
PY - 2016/7/1
Y1 - 2016/7/1
UR - http://scitation.aip.org/content/avs/journal/jvsta/34/4/10.1116/1.4954949
U2 - 10.1116/1.4954949
DO - 10.1116/1.4954949
M3 - Article
VL - 34.2016
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 4
M1 - 041517
ER -
