Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN. / Saringer, Christian; Franz, Robert; Zorn, Katrin et al.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 34.2016, Nr. 4, 041517, 01.07.2016.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Bibtex - Download

@article{efe8d011d39f48a0a82ba94e3c7c7da2,
title = "Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN",
author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",
year = "2016",
month = jul,
day = "1",
doi = "10.1116/1.4954949",
language = "English",
volume = "34.2016",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

AU - Saringer, Christian

AU - Franz, Robert

AU - Zorn, Katrin

AU - Mitterer, Christian

PY - 2016/7/1

Y1 - 2016/7/1

UR - http://scitation.aip.org/content/avs/journal/jvsta/34/4/10.1116/1.4954949

U2 - 10.1116/1.4954949

DO - 10.1116/1.4954949

M3 - Article

VL - 34.2016

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

IS - 4

M1 - 041517

ER -