Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
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Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN. / Saringer, Christian; Franz, Robert; Zorn, Katrin et al.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 34.2016, Nr. 4, 041517, 01.07.2016.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 34.2016, Nr. 4, 041517, 01.07.2016.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Saringer C, Franz R, Zorn K, Mitterer C. Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN. Journal of vacuum science & technology / A (JVST). 2016 Jul 1;34.2016(4):041517. doi: 10.1116/1.4954949
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Bibtex - Download
@article{efe8d011d39f48a0a82ba94e3c7c7da2,
title = "Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN",
author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",
year = "2016",
month = jul,
day = "1",
doi = "10.1116/1.4954949",
language = "English",
volume = "34.2016",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
AU - Saringer, Christian
AU - Franz, Robert
AU - Zorn, Katrin
AU - Mitterer, Christian
PY - 2016/7/1
Y1 - 2016/7/1
UR - http://scitation.aip.org/content/avs/journal/jvsta/34/4/10.1116/1.4954949
U2 - 10.1116/1.4954949
DO - 10.1116/1.4954949
M3 - Article
VL - 34.2016
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 4
M1 - 041517
ER -
