Georg Gruber
(Former)
11 - 11 out of 11Page size: 10
Research output
- 2019
- Published
The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties
Rausch, M., Sabag, A., Pichler, K-H., Gruber, G., Köstenbauer, J., Köstenbauer, H., Kreiml, P., Cordill, M. J., Winkler, J. & Mitterer, C., 2019, In: Surface & coatings technology. 381.2020, 15 January, 14 p., 125174.Research output: Contribution to journal › Article › Research › peer-review
