The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- PLANSEE SE
- Erich Schmid Institute of Materials Science
Details
| Original language | English |
|---|---|
| Article number | 125174 |
| Number of pages | 14 |
| Journal | Surface & coatings technology |
| Volume | 381.2020 |
| Issue number | 15 January |
| Early online date | 18 Nov 2019 |
| DOIs | |
| Publication status | Published - 2019 |
