Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum
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Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum. / Zöhrer, Siegfried; Anders, André; Franz, Robert.
in: Plasma sources science & technology, 2018, S. 1-17.
in: Plasma sources science & technology, 2018, S. 1-17.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Zöhrer S, Anders A, Franz R. Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum. Plasma sources science & technology. 2018;1-17. doi: 10.1088/1361-6595/aabdc7
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@article{a88e6fe7ee154caba55231d350b291f8,
title = "Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum",
author = "Siegfried Z{\"o}hrer and Andr{\'e} Anders and Robert Franz",
year = "2018",
doi = "10.1088/1361-6595/aabdc7",
language = "English",
pages = "1--17",
journal = "Plasma sources science & technology",
issn = "0963-0252",
publisher = "IOP Publishing Ltd.",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum
AU - Zöhrer, Siegfried
AU - Anders, André
AU - Franz, Robert
PY - 2018
Y1 - 2018
U2 - 10.1088/1361-6595/aabdc7
DO - 10.1088/1361-6595/aabdc7
M3 - Article
SP - 1
EP - 17
JO - Plasma sources science & technology
JF - Plasma sources science & technology
SN - 0963-0252
ER -
