Observation of structural depth profile of porous silicon by atomic force microscopy

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Observation of structural depth profile of porous silicon by atomic force microscopy. / Prohaska, Thomas; Chang, D.
in: Journal of porous materials, 2000, S. 349-352.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{06f134882cd8478e969f9748d62d4f91,
title = "Observation of structural depth profile of porous silicon by atomic force microscopy",
author = "Thomas Prohaska and D. Chang",
year = "2000",
language = "English",
pages = "349--352",
journal = " Journal of porous materials",
issn = "1573-4854",
publisher = "Kluwer Academic Publishers",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Observation of structural depth profile of porous silicon by atomic force microscopy

AU - Prohaska, Thomas

AU - Chang, D.

PY - 2000

Y1 - 2000

M3 - Article

SP - 349

EP - 352

JO - Journal of porous materials

JF - Journal of porous materials

SN - 1573-4854

ER -