Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

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Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets. / Weirather, Thomas; Grasser, Stephan; Czettl, Christoph et al.
2013. Postersitzung präsentiert bei 18th Plansee Seminar, Reutte, Österreich.

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

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@conference{7283a6e152d3478ca4ccdc3cdc119b0a,
title = "Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets",
author = "Thomas Weirather and Stephan Grasser and Christoph Czettl and P. Polcik and M. Kathrein and Christian Mitterer",
year = "2013",
language = "English",
note = "18th Plansee Seminar ; Conference date: 03-06-2013 Through 07-06-2013",

}

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TY - CONF

T1 - Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

AU - Weirather, Thomas

AU - Grasser, Stephan

AU - Czettl, Christoph

AU - Polcik, P.

AU - Kathrein, M.

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

M3 - Poster

T2 - 18th Plansee Seminar

Y2 - 3 June 2013 through 7 June 2013

ER -