Evaluation of the residual stress distribution in thin films by means of the ion beam layer removal method
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Autoren
Organisationseinheiten
Externe Organisationseinheiten
- Materials Center Leoben Forschungs GmbH
Details
| Originalsprache | Englisch |
|---|---|
| Titel | Proceedings of the 15th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems EuroSimE 2014 |
| Redakteure/-innen | G.Q. Zhang, W.D. Van Driel, P. Rodgers, C. Bailey, O. de Saint Leger |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers |
| ISBN (Print) | 978-1-4799-4791-1 |
| DOIs | |
| Status | Veröffentlicht - 2014 |
| Veranstaltung | 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Gent, Belgien Dauer: 7 Apr. 2014 → 9 Apr. 2014 |
Konferenz
| Konferenz | 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems |
|---|---|
| Kurztitel | EuroSimE 2014 |
| Land/Gebiet | Belgien |
| Ort | Gent |
| Zeitraum | 7/04/14 → 9/04/14 |
