Evaluation of the residual stress distribution in thin films by means of the ion beam layer removal method
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
Authors
Organisational units
External Organisational units
- Materials Center Leoben Forschungs GmbH
Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 15th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems EuroSimE 2014 |
| Editors | G.Q. Zhang, W.D. Van Driel, P. Rodgers, C. Bailey, O. de Saint Leger |
| Publisher | Institute of Electrical and Electronics Engineers |
| ISBN (print) | 978-1-4799-4791-1 |
| DOIs | |
| Publication status | Published - 2014 |
| Event | 15th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems EuroSimE 2014 - Gent, Belgium Duration: 7 Apr 2014 → 9 Apr 2014 |
Conference
| Conference | 15th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems EuroSimE 2014 |
|---|---|
| Abbreviated title | EuroSimE 2014 |
| Country/Territory | Belgium |
| City | Gent |
| Period | 7/04/14 → 9/04/14 |
