Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density
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Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density. / Köstenbauer, Harald; Fontalvo, Gerardo; Kapp, Marianne et al.
in: Surface & coatings technology, Jahrgang 201, 2007, S. 4777-4780.
in: Surface & coatings technology, Jahrgang 201, 2007, S. 4777-4780.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Köstenbauer H, Fontalvo G, Kapp M, Keckes J, Mitterer C. Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density. Surface & coatings technology. 2007;201:4777-4780. doi: 10.1016/j.surfcoat.2006.10.017
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@article{0b4082444d904ba49dc5c87dc761c0d7,
title = "Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density",
author = "Harald K{\"o}stenbauer and Gerardo Fontalvo and Marianne Kapp and Jozef Keckes and Christian Mitterer",
year = "2007",
doi = "10.1016/j.surfcoat.2006.10.017",
language = "English",
volume = "201",
pages = "4777--4780",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density
AU - Köstenbauer, Harald
AU - Fontalvo, Gerardo
AU - Kapp, Marianne
AU - Keckes, Jozef
AU - Mitterer, Christian
PY - 2007
Y1 - 2007
U2 - 10.1016/j.surfcoat.2006.10.017
DO - 10.1016/j.surfcoat.2006.10.017
M3 - Article
VL - 201
SP - 4777
EP - 4780
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
