Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

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@article{0b4082444d904ba49dc5c87dc761c0d7,
title = "Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density",
author = "Harald K{\"o}stenbauer and Gerardo Fontalvo and Marianne Kapp and Jozef Keckes and Christian Mitterer",
year = "2007",
doi = "10.1016/j.surfcoat.2006.10.017",
language = "English",
volume = "201",
pages = "4777--4780",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",

}

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TY - JOUR

T1 - Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

AU - Köstenbauer, Harald

AU - Fontalvo, Gerardo

AU - Kapp, Marianne

AU - Keckes, Jozef

AU - Mitterer, Christian

PY - 2007

Y1 - 2007

U2 - 10.1016/j.surfcoat.2006.10.017

DO - 10.1016/j.surfcoat.2006.10.017

M3 - Article

VL - 201

SP - 4777

EP - 4780

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

ER -