Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density
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In: Surface & coatings technology, Vol. 201, 2007, p. 4777-4780.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density
AU - Köstenbauer, Harald
AU - Fontalvo, Gerardo
AU - Kapp, Marianne
AU - Keckes, Jozef
AU - Mitterer, Christian
PY - 2007
Y1 - 2007
U2 - 10.1016/j.surfcoat.2006.10.017
DO - 10.1016/j.surfcoat.2006.10.017
M3 - Article
VL - 201
SP - 4777
EP - 4780
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -