Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

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Authors

Translated title of the contribution	Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density
Original language	English
Pages (from-to)	4777-4780
Journal	Surface & coatings technology
Volume	201
DOIs	https://doi.org/10.1016/j.surfcoat.2006.10.017
Publication status	Published - 2007