Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

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Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature. / Pilz, Julian; Perrotta, Alberto; Christian, Paul et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 36, No. 1, 01A109, 01.01.2018.

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@article{fcc746283b684342a0876bc203639dab,
title = "Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature",
author = "Julian Pilz and Alberto Perrotta and Paul Christian and Martin Tazreiter and Roland Resel and G{\"u}nther Leising and Thomas Griesser and Coclite, {Anna Maria}",
year = "2018",
month = jan,
day = "1",
doi = "10.1116/1.5003334",
language = "English",
volume = "36",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",

}

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TY - JOUR

T1 - Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

AU - Pilz, Julian

AU - Perrotta, Alberto

AU - Christian, Paul

AU - Tazreiter, Martin

AU - Resel, Roland

AU - Leising, Günther

AU - Griesser, Thomas

AU - Coclite, Anna Maria

PY - 2018/1/1

Y1 - 2018/1/1

UR - http://www.scopus.com/inward/record.url?scp=85037698565&partnerID=8YFLogxK

U2 - 10.1116/1.5003334

DO - 10.1116/1.5003334

M3 - Article

AN - SCOPUS:85037698565

VL - 36

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

SN - 0734-2101

IS - 1

M1 - 01A109

ER -