Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Research output: Contribution to journal › Article › Research › peer-review

Standard

Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature. / Pilz, Julian; Perrotta, Alberto; Christian, Paul et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 36, No. 1, 01A109, 01.01.2018.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Pilz, J, Perrotta, A, Christian, P, Tazreiter, M, Resel, R, Leising, G, Griesser, T & Coclite, AM 2018, 'Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 36, no. 1, 01A109. https://doi.org/10.1116/1.5003334

APA

Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T., & Coclite, A. M. (2018). Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 36(1), Article 01A109. https://doi.org/10.1116/1.5003334

Vancouver

Pilz J, Perrotta A, Christian P, Tazreiter M, Resel R, Leising G et al. Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2018 Jan 1;36(1):01A109. doi: 10.1116/1.5003334

Author

Pilz, Julian ; Perrotta, Alberto ; Christian, Paul et al. / Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2018 ; Vol. 36, No. 1.

Bibtex - Download

@article{fcc746283b684342a0876bc203639dab,
title = "Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature",
author = "Julian Pilz and Alberto Perrotta and Paul Christian and Martin Tazreiter and Roland Resel and G{\"u}nther Leising and Thomas Griesser and Coclite, {Anna Maria}",
year = "2018",
month = jan,
day = "1",
doi = "10.1116/1.5003334",
language = "English",
volume = "36",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

AU - Pilz, Julian

AU - Perrotta, Alberto

AU - Christian, Paul

AU - Tazreiter, Martin

AU - Resel, Roland

AU - Leising, Günther

AU - Griesser, Thomas

AU - Coclite, Anna Maria

PY - 2018/1/1

Y1 - 2018/1/1

UR - http://www.scopus.com/inward/record.url?scp=85037698565&partnerID=8YFLogxK

U2 - 10.1116/1.5003334

DO - 10.1116/1.5003334

M3 - Article

AN - SCOPUS:85037698565

VL - 36

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

SN - 0734-2101

IS - 1

M1 - 01A109

ER -

View graph of relations

SFX

Publication SFX